1 October 2001 MEMS antennas for millimeter-wave applications
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This paper presents the design, fabrication and measurement of membrane supported double-folded slot coplanar waveguide (CPW) feed antenna structures. The central operating frequency for the two antennas are 77 GHz and 94 GHz. The antennas were fabricated on 1.5 micrometers thick SiO2/Si3N4 dielectric membranes micromachined from a 350 micrometers thick high resistivity silicon substrate. The design was based on electromagnetic simulations using Zeland IE3D software package and a circuital approach for modeling the CPW feed lines. The experimental results show a return loss of -24.35 dB at 74.5 GHz for the 77 GHz antenna structure and -27.5 dB at 92.85 GHz for the 94 GHz antenna structure. The agreement between the frequency dependence of the return loss of the experimental and simulated results is very good. These results will be used in the design and fabrication of micromachined microsystems front-ends as millimeter wave transmitters and receivers.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dan Neculoiu, Patrick Pons, Robert Plana, Pierre Blondy, Alexandru Mueller, and Dan Vasilache "MEMS antennas for millimeter-wave applications", Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); doi: 10.1117/12.443020; https://doi.org/10.1117/12.443020


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