Magnetostatic straight edge resonators on micromachined silicon membrane

George Sajin; Romolo Marcelli

doi:10.1117/12.443034

1 October 2001 Magnetostatic straight edge resonators on micromachined silicon membrane

George Sajin, Romolo Marcelli

Proceedings Volume 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication; (2001) https://doi.org/10.1117/12.443034
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

A frequency tunable magnetostatic wave (MSW) straight edge resonator (SER) made by a YIG film has been used as a selective frequency component in a micromachined resonating filter. S-parameters have been measured at different DC magnetic bias fields, with a frequency tunability between 2 GHz and 6 GHz ca.. An improvement of the performances for the SERs excited by micromachined microstrip transducers has been clearly demonstrated. Moreover, the utilization of silicon membranes to support MSW-SERs offers important openings toward the integration of magnetostatic wave devices with micromachined structures.

Citation Download Citation

George Sajin and Romolo Marcelli "Magnetostatic straight edge resonators on micromachined silicon membrane", Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); https://doi.org/10.1117/12.443034

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available