1 October 2001 Magnetostatic straight edge resonators on micromachined silicon membrane
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A frequency tunable magnetostatic wave (MSW) straight edge resonator (SER) made by a YIG film has been used as a selective frequency component in a micromachined resonating filter. S-parameters have been measured at different DC magnetic bias fields, with a frequency tunability between 2 GHz and 6 GHz ca.. An improvement of the performances for the SERs excited by micromachined microstrip transducers has been clearly demonstrated. Moreover, the utilization of silicon membranes to support MSW-SERs offers important openings toward the integration of magnetostatic wave devices with micromachined structures.
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George Sajin and Romolo Marcelli "Magnetostatic straight edge resonators on micromachined silicon membrane", Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); doi: 10.1117/12.443034; https://doi.org/10.1117/12.443034

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