Single-layer silicon-on-insulator MEMS gyroscope for wide dynamic range and harsh environment applications

Michael S. Kranz; Tracy Dean Hudson; Paul R. Ashley; Paul B. Ruffin; Sherrie J. Burgett; Mark Temmen; Jerry Tuck

doi:10.1117/12.443029

1 October 2001 Single-layer silicon-on-insulator MEMS gyroscope for wide dynamic range and harsh environment applications

Michael S. Kranz, Tracy Dean Hudson, Paul R. Ashley, Paul B. Ruffin, Sherrie J. Burgett, Mark Temmen, Jerry Tuck

Author Affiliations +

Proceedings Volume 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication; (2001) https://doi.org/10.1117/12.443029
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

The Army Aviation and Missile Command (AMCOM), Morgan Research Corporation, and Aegis Research Corporation are developing an SOI-based vibratory-rate z-axis MEMS gyroscope utilizing force-feedback control, and intended for wide dynamic range and harsh environment applications. Rate sensing in small diameter ballistic missile guidance units requires a rate resolution of less than 1 degree(s)/hr over a range of -3000 to +3000 degree(s)/sec, resulting in a dynamic range of 10⁷. In addition, the devices must operate through military specifications on temperature (-55 degree(s)C to +125 degree(s)C) and vibration (1000 g at 5 - 15 kHz). This paper presents modeling, simulation, and fabrication efforts, as well as initial test data, for an SOI-based rate sensor intended for this application. The prototyped gyroscope is a single layer structure consisting of a proof mass placed in a three-fold mode-decoupled symmetric suspension. The device is fabricated in a cost-effective and highly-controllable Silicon-on-Insulator (SOI) process for in-plane inertial devices. The mechanical structure is integrated in a vacuum-sealed hermetic package with a separate CMOS readout ASIC. At the present time, the device has undergone two design iterations, with the most recent just completed.

Citation Download Citation

Michael S. Kranz, Tracy Dean Hudson, Paul R. Ashley, Paul B. Ruffin, Sherrie J. Burgett, Mark Temmen, and Jerry Tuck "Single-layer silicon-on-insulator MEMS gyroscope for wide dynamic range and harsh environment applications", Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); https://doi.org/10.1117/12.443029

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