Single-layer silicon-on-insulator MEMS gyroscope for wide dynamic range and harsh environment applications

Michael S. Kranz; Tracy Dean Hudson; Paul R. Ashley; Paul B. Ruffin; Sherrie J. Burgett; Mark Temmen; Jerry Tuck

doi:10.1117/12.443029

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1 October 2001 Single-layer silicon-on-insulator MEMS gyroscope for wide dynamic range and harsh environment applications

Michael S. Kranz, Tracy Dean Hudson, Paul R. Ashley, Paul B. Ruffin, Sherrie J. Burgett, Mark Temmen, Jerry Tuck

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Proceedings Volume 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication; (2001) https://doi.org/10.1117/12.443029
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

The Army Aviation and Missile Command (AMCOM), Morgan Research Corporation, and Aegis Research Corporation are developing an SOI-based vibratory-rate z-axis MEMS gyroscope utilizing force-feedback control, and intended for wide dynamic range and harsh environment applications. Rate sensing in small diameter ballistic missile guidance units requires a rate resolution of less than 1 degree(s)/hr over a range of -3000 to +3000 degree(s)/sec, resulting in a dynamic range of 10⁷. In addition, the devices must operate through military specifications on temperature (-55 degree(s)C to +125 degree(s)C) and vibration (1000 g at 5 - 15 kHz). This paper presents modeling, simulation, and fabrication efforts, as well as initial test data, for an SOI-based rate sensor intended for this application. The prototyped gyroscope is a single layer structure consisting of a proof mass placed in a three-fold mode-decoupled symmetric suspension. The device is fabricated in a cost-effective and highly-controllable Silicon-on-Insulator (SOI) process for in-plane inertial devices. The mechanical structure is integrated in a vacuum-sealed hermetic package with a separate CMOS readout ASIC. At the present time, the device has undergone two design iterations, with the most recent just completed.

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Michael S. Kranz, Tracy Dean Hudson, Paul R. Ashley, Paul B. Ruffin, Sherrie J. Burgett, Mark Temmen, and Jerry Tuck "Single-layer silicon-on-insulator MEMS gyroscope for wide dynamic range and harsh environment applications", Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); https://doi.org/10.1117/12.443029

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