Development of surface micromachining technologies for microfluidics and bioMEMS

Murat Okandan; Paul Galambos; Sita S. Mani; Jerome F. Jakubczak

doi:10.1117/12.443052

28 September 2001 Development of surface micromachining technologies for microfluidics and bioMEMS

Murat Okandan, Paul Galambos, Sita S. Mani, Jerome F. Jakubczak

Proceedings Volume 4560, Microfluidics and BioMEMS; (2001) https://doi.org/10.1117/12.443052
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

In the last decade, examples of devices manufactured with SUMMiT(TM) technology have demonstrated the capabilities of polysilicon surface micromachining. Currently we are working on enhancements to this technology that utilize additional structural layers of silicon nitride to enable Microfluidics and BioMEMS applications. The addition of the silicon nitride layers allows the fabrication of microfluidic flow channels that are transparent (allowing observation of cellular motion) and insulating (allowing the placement of polysilicon electrodes at arbitrary locations in the flow channels). The goal of this technology development effort is to ultimately provide functionality that is not feasible with other microfabrication technologies. The enhancements build on the key features of surface micromachining: manufacturability and compatibility with CMOS processing, which allow us to leverage the investment already made in the microelectronics processing technology. In this paper we will present examples of devices fabricated using this new enhanced surface micromachining technology. These devices include pumps, valves, and a cell manipulator.

Citation Download Citation

Murat Okandan, Paul Galambos, Sita S. Mani, and Jerome F. Jakubczak "Development of surface micromachining technologies for microfluidics and bioMEMS", Proc. SPIE 4560, Microfluidics and BioMEMS, (28 September 2001); https://doi.org/10.1117/12.443052

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