Dynamic modeling and optimization of a valveless PZT micropump

Shifeng Li; Yang Liu; Shaochen Chen

doi:10.1117/12.443072

28 September 2001 Dynamic modeling and optimization of a valveless PZT micropump

Shifeng Li, Yang Liu, Shaochen Chen

Proceedings Volume 4560, Microfluidics and BioMEMS; (2001) https://doi.org/10.1117/12.443072
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

A dynamic model for a PZT actuated valveless micropump is presented in this work. The model couples PZT actuation with fluid flow in a flow chamber. Extended Bernoulli equation is used to describe flow dynamics in the inlet and outlet of the micropump. The dependence of the output pressure and flow rate on pump parameters is discussed. For low frequency actuation, the flow rate and back pressure increase as the PZT membrane thickness increases. The flow rate also increases for larger nozzle neck. The back pressure increases as the nozzle neck enlarges, reaches a maximum at about 80 microns, and then decreases when the nozzle neck keeps increasing. Such dependence becomes insignificant for nozzle neck larger than 200 microns. This model also predicts that the neck length has little influence on the back pressure and flow rate.

Citation Download Citation

Shifeng Li, Yang Liu, and Shaochen Chen "Dynamic modeling and optimization of a valveless PZT micropump", Proc. SPIE 4560, Microfluidics and BioMEMS, (28 September 2001); https://doi.org/10.1117/12.443072

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available