28 September 2001 Dynamic modeling and optimization of a valveless PZT micropump
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Proceedings Volume 4560, Microfluidics and BioMEMS; (2001) https://doi.org/10.1117/12.443072
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
A dynamic model for a PZT actuated valveless micropump is presented in this work. The model couples PZT actuation with fluid flow in a flow chamber. Extended Bernoulli equation is used to describe flow dynamics in the inlet and outlet of the micropump. The dependence of the output pressure and flow rate on pump parameters is discussed. For low frequency actuation, the flow rate and back pressure increase as the PZT membrane thickness increases. The flow rate also increases for larger nozzle neck. The back pressure increases as the nozzle neck enlarges, reaches a maximum at about 80 microns, and then decreases when the nozzle neck keeps increasing. Such dependence becomes insignificant for nozzle neck larger than 200 microns. This model also predicts that the neck length has little influence on the back pressure and flow rate.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shifeng Li, Shifeng Li, Yang Liu, Yang Liu, Shaochen Chen, Shaochen Chen, } "Dynamic modeling and optimization of a valveless PZT micropump", Proc. SPIE 4560, Microfluidics and BioMEMS, (28 September 2001); doi: 10.1117/12.443072; https://doi.org/10.1117/12.443072

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