Microfabrication and primary test of a dosing actuator driven by electrolysis

Xuanxiong Zhang; Yuan Xu; Xujiang He; Francis Eng Hock Tay

doi:10.1117/12.443051

28 September 2001 Microfabrication and primary test of a dosing actuator driven by electrolysis

Xuanxiong Zhang, Yuan Xu, Xujiang He, Francis Eng Hock Tay

Proceedings Volume 4560, Microfluidics and BioMEMS; (2001) https://doi.org/10.1117/12.443051
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

In this paper, an electrochemical actuator was fabricated and tested. The good linearity relationship between the dosing rate and the electrolysis current has been achieved for the demonstrative electrochemical actuator in the selected electrolyte and electrode material cell from 50 micro-A to 1000 micro-A electrolysis current. The microflow rate less than the evaporation that can be obtained by an improved standard gravimetric method in situ. The error resulted from tested work liquid inevitable evaporation was also excluded by the improved approach at very low microflow testing. The on-line testing method can be used as very low microflow rate calibration. The lowest stable flow rate was 0.19 micro-liter/min (3.2nl/s). The response time was also shown by the means of on-line measurement.

Citation Download Citation

Xuanxiong Zhang, Yuan Xu, Xujiang He, and Francis Eng Hock Tay "Microfabrication and primary test of a dosing actuator driven by electrolysis", Proc. SPIE 4560, Microfluidics and BioMEMS, (28 September 2001); https://doi.org/10.1117/12.443051

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