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28 September 2001 Microfluidic technology and polymer nanoimprinting
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Proceedings Volume 4560, Microfluidics and BioMEMS; (2001) https://doi.org/10.1117/12.443065
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
Abstract
Technological interest in microfluidic systems have been increased day by day. This paper scans the microfluidic technology for modeling, simulation, and fabrication processes. The advantages of polymers for microfluidic devices over common MEMS processing of glass and silicon are becoming increasingly important. This is due to the biocompatible polymer surfaces, low cost production, and availability of different material properties and chemistry. Hot-embossing technology for high aspect ratio structures as well as polymer nanoimprinting for low cost manufacturing MEMS process are discussed.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rafiqul Islam and Thomas Glinsner "Microfluidic technology and polymer nanoimprinting", Proc. SPIE 4560, Microfluidics and BioMEMS, (28 September 2001); https://doi.org/10.1117/12.443065
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