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28 September 2001 Modeling the electrostatic self-assembly (ESA) fabrication process using cellular automata
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Proceedings Volume 4560, Microfluidics and BioMEMS; (2001)
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
The electro-static self-assembly process, or ESA, has proved to be extremely successful in creating multi-layer coatings with properties that can be optimized for particular applications. In this process, almost any surface with charged functional groups can be used as a substrate. Sequential dipping in solutions having ions of opposite charge builds up the layers through ionic bonding. Multi- functional bio-compatible coatings on MEMS deices intended for use in-vivo could be formed using ESA. In this paper, we describe two different models of the process based on adaptive computational techniques using cellular automata. The output of the models consists of three parameters as a function of layer: layer coverage, total average coating height and layer roughness. The result of the models are compared to experimental data to determine which of them more accurately mirrors the ESA process.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
William B. Spillman Jr., Tingying Zeng, and Richard O. Claus "Modeling the electrostatic self-assembly (ESA) fabrication process using cellular automata", Proc. SPIE 4560, Microfluidics and BioMEMS, (28 September 2001);

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