2 October 2001 Design and fabrication of micromirror arrays for UV lithography
Author Affiliations +
Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443094
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
Abstract
Modern UV-lithography is searching for new highly parallel writing concepts. Spatial light modulation (SLM) offers such possibilities but special emphasis must be put on the ability of SLM devices to handle ultraviolet light (UV). We designed and fabricated micromirror arrays which fulfill these requirements. Possible applications for such UV-SLMs are direct writing systems for semiconductor and printing, and UV-stimulated biochemistry. For deep UV laser pattern generation (248 nm) e.g. we designed and fabricated a 2048x512 pixel UV-SLM with individually addressable aluminum micromirrors. They are illuminated by an excimer laser pulse and imaged onto a photomask substrate. A complete pattern is stitched together at a rate of 1 kHz. The minimum feature size is 320 nm and analog modulation of the pixels allows to realize an address grid of only 1.6 nm. The design of the array is modular so that other array sizes can be tailor made to customers needs. Design and fabrication aspects for a CMOS compatible realization of these micromirror arrays are addressed as well as their performance in lithography applications.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hubert K. Lakner, Hubert K. Lakner, Peter Duerr, Peter Duerr, Ulrike Dauderstaedt, Ulrike Dauderstaedt, Wolfgang Doleschal, Wolfgang Doleschal, Joerg Amelung, Joerg Amelung, } "Design and fabrication of micromirror arrays for UV lithography", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443094; https://doi.org/10.1117/12.443094
PROCEEDINGS
10 PAGES


SHARE
RELATED CONTENT

Laser PG performance for 100-nm photomasks
Proceedings of SPIE (December 26 2002)
A high-end mask writer using a spatial light modulator
Proceedings of SPIE (January 21 2005)
Pattern generation with SLM imaging
Proceedings of SPIE (March 10 2002)
Design and fabrication of a pre aligned free space optical...
Proceedings of SPIE (February 14 2011)

Back to Top