Finite element modeling of the thermo-electro-mechanical coupling in pyroelectric infrared sensor arrays

Joerg Drescher; Herbert Balke; Hans-Achim Bahr; Guenter Milde; Gerald Gerlach

doi:10.1117/12.443103

2 October 2001 Finite element modeling of the thermo-electro-mechanical coupling in pyroelectric infrared sensor arrays

Joerg Drescher, Herbert Balke, Hans-Achim Bahr, Guenter Milde, Gerald Gerlach

Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443103
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

For the example of a Lithiumtantalate (LiTaO₃) sensor array, the coupled thermo-electro-mechanical fields are examined using the finite element method. The temperature distribution is computed in a preliminary thermal analysis, and the numerical results are compared with an analytical model. The calculated temperature field is used as input for a subsequent electro-mechanical analysis, wehre the thermo-elastic and the pyroelectric source terms are simulated by body forces and body charges, respectively. The investigations of various FEM-models showed, that different mechanical boundary conditions and the piezoelectric coupling of LiTaO₃ influence the electric system response by only about 6...7%.

Citation Download Citation

Joerg Drescher, Herbert Balke, Hans-Achim Bahr, Guenter Milde, and Gerald Gerlach "Finite element modeling of the thermo-electro-mechanical coupling in pyroelectric infrared sensor arrays", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); https://doi.org/10.1117/12.443103

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