High-efficiency optical MEMS by the integration of photonic lattices with surface MEMS

James G. Fleming; Seethambal S. Mani; Shawn-Yu Lin

doi:10.1117/12.443085

2 October 2001 High-efficiency optical MEMS by the integration of photonic lattices with surface MEMS

James G. Fleming, Seethambal S. Mani, Shawn-Yu Lin

Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443085
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

An overview is given of the integration of 1,2 and 3D photonic lattice structures with surface MEMS (MicroElectroMechanical Systems). The properties of the photonic lattice arise as a result of a high index contrast between two or more media arranged in an appropriate fashion. Increased photonic lattice functionality is obtained as the arrangement of high and low index materials is extended into other dimensions. Potential photonic lattice functions which can be integrated with surface MEMS include mirrors, cavities and wavelength dependent switches in 1D, waveguides and prisms in 2D and 3D waveguides, prisms, polarization, dispersion, thermal and spontaneous emission control in 3D.

Citation Download Citation

James G. Fleming, Seethambal S. Mani, and Shawn-Yu Lin "High-efficiency optical MEMS by the integration of photonic lattices with surface MEMS", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); https://doi.org/10.1117/12.443085

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KEYWORDS

Microelectromechanical systems

Waveguides

Silicon

Mirrors

Microopto electromechanical systems

Photonic crystals

Refractive index

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