2 October 2001 High-efficiency optical MEMS by the integration of photonic lattices with surface MEMS
Author Affiliations +
Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443085
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
Abstract
An overview is given of the integration of 1,2 and 3D photonic lattice structures with surface MEMS (MicroElectroMechanical Systems). The properties of the photonic lattice arise as a result of a high index contrast between two or more media arranged in an appropriate fashion. Increased photonic lattice functionality is obtained as the arrangement of high and low index materials is extended into other dimensions. Potential photonic lattice functions which can be integrated with surface MEMS include mirrors, cavities and wavelength dependent switches in 1D, waveguides and prisms in 2D and 3D waveguides, prisms, polarization, dispersion, thermal and spontaneous emission control in 3D.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James G. Fleming, James G. Fleming, Seethambal S. Mani, Seethambal S. Mani, Shawn-Yu Lin, Shawn-Yu Lin, } "High-efficiency optical MEMS by the integration of photonic lattices with surface MEMS", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443085; https://doi.org/10.1117/12.443085
PROCEEDINGS
6 PAGES


SHARE
RELATED CONTENT

Silicon-based one-dimensional photonic crystal microcavity
Proceedings of SPIE (December 07 2004)
Recent advances in optical MEMS devices and systems
Proceedings of SPIE (November 14 2002)
Variations in a design for a nanoscale silicon laser
Proceedings of SPIE (November 09 2003)
Investigation of a T shaped waveguides based on a silicon...
Proceedings of SPIE (September 12 2005)

Back to Top