2 October 2001 Optical performance of pivoting micromirrors
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Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443097
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
Abstract
In this paper we describe optical and dynamic performance of tip/tilt micromachined mirrors fabricated using the SUMMIT V surface micromachining process. We find that the tilt angle for a given mirror design is determined by a combination of geometric factors and stiffness of the capacitive suspension. Switching speeds of ~40-50 microsecond(s) econds are measured for 50 micrometers -square mirrors. Finally surface roughness and curvature before and after metallization are obtained using white light interferometry.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Olga Blum Spahn, Olga Blum Spahn, Ernest J. Garcia, Ernest J. Garcia, Victor C. Esch, Victor C. Esch, Grant D. Grossetete, Grant D. Grossetete, Fernando Bitsie, Fernando Bitsie, Sita S. Mani, Sita S. Mani, Jerome F. Jakubczak, Jerome F. Jakubczak, } "Optical performance of pivoting micromirrors", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443097; https://doi.org/10.1117/12.443097
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