2 October 2001 Silicon-on-insulator micromechanical optical switch with postprocessed polymeric waveguides
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Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443078
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
Abstract
A micro-mechanical optical switch based on lateral deflection of a waveguide is described. The switching element is a suspended silicon beam formed by deep reactive ion etching and release of silicon-on-insulator (SOI). Actuation is implemented using integrated electrostatic comb drives. Dry etched polymeric optical waveguides are post processed onto the mechanical structure. We present design, simulations, and preliminary experimental results.
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Thor Bakke, Chris P. Tigges, Charles T. Sullivan, "Silicon-on-insulator micromechanical optical switch with postprocessed polymeric waveguides", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443078; https://doi.org/10.1117/12.443078
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