2 October 2001 Vertical stiffening members for flatness control of surface-micromachined structures
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Proceedings Volume 4561, MOEMS and Miniaturized Systems II; (2001) https://doi.org/10.1117/12.443091
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States
Abstract
Surface-micromachined devices with large length-to-thickness ratios can deform considerably once released from the substrate. This can be a serious problem for large aperture optical components where deformation due to internal stresses must be controlled. Adding stiffening fins with various geometric configurations to surface micromachined structures has been shown to significantly reduce stress-related deformations. The stiffening fins have also been shown to control deformations in uni-axial and bi-axial tilt mirrors. In this paper we investigate the use of stiffening members with various lattice configurations to reduce stress-induced deformation of silicon nitride cantilever beams. Stiffness and flatness of these structures are investigated both experimentally and analytically.
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B. Jeffrey Lutzenberger, B. Jeffrey Lutzenberger, David L. Dickensheets, David L. Dickensheets, } "Vertical stiffening members for flatness control of surface-micromachined structures", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, (2 October 2001); doi: 10.1117/12.443091; https://doi.org/10.1117/12.443091
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