11 March 2002 Application of automatic parallel fracturing system on hierarchical and large data structure
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Proceedings Volume 4562, 21st Annual BACUS Symposium on Photomask Technology; (2002); doi: 10.1117/12.458351
Event: Photomask 2001, 2001, Monterey, CA, United States
Abstract
TO enable efficient transformation of layout data to Electron Beam lithography drawing data in production, we have developed an automatic parallel-processing fracturing system named Tribune. Tribune can effectively use both parallel and hierarchical processing together to maximize the fracturing performance to easily handle large amounts of layout data. Tribune is designed to effectively use both parallel and hierarchical methods with the aid of cell information known by layout designers. A new fracturing algorithm is employed which fractures patterns whose width is wider than specified critical dimensions to minimize the number of tiny geometries for the improvement of pattern fidelity.
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Eiji Tsujimoto, Takahiro Watanabe, Keitaro Katabuchi, Akihiro Nogami, Shuji Shibayama, Hirokazu Sambayashi, Shozo Takaku, Norihiko Takase, "Application of automatic parallel fracturing system on hierarchical and large data structure", Proc. SPIE 4562, 21st Annual BACUS Symposium on Photomask Technology, (11 March 2002); doi: 10.1117/12.458351; https://doi.org/10.1117/12.458351
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KEYWORDS
Parallel processing

Data conversion

Reticles

Optical proximity correction

Algorithm development

Lawrencium

Data processing

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