Multibeam high-resolution die-to-database reticle inspection

William Waters Volk; William H. Broadbent; Hector I. Garcia; Sterling G. Watson; Phillip Lim; Wayne E. Ruch

doi:10.1117/12.458271

11 March 2002 Multibeam high-resolution die-to-database reticle inspection

William Waters Volk, William H. Broadbent, Hector I. Garcia, Sterling G. Watson, Phillip Lim, Wayne E. Ruch

Proceedings Volume 4562, 21st Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.458271
Event: Photomask 2001, 2001, Monterey, CA, United States

Abstract

A new die-to-database reticle inspection system has been developed to meet the production requirements for 130nm node 4x reticles, as well as, the early inspection requirements for 100nm node 4x reticles. This new system is based on the TeraStarT platform1 developed recently by KLA-Tencor Corporation for high performance die-to-die and STARlightT inspection of 130nm node reticles. The TeraStar platform uses high-NA triple-beam scanning laser optics for high throughput. The platform also includes a new generation of defect detection algorithms and image processing hardware to inspect, with high sensitivity and low false detections, the small linewidths, aggressive OPC, and advanced EPSM 4x reticles characteristic of the 130nm node. The platform further includes the TeraProTM concurrent STARlight and die-to-die inspection mode for exceptional productivity. The necessary database elements have now been developed and added to the TeraStar platform, to give it die-to-database inspection capability. A new data format along with new data preparation, data rendering, and data modeling algorithms have been developed to allow high precision database matching with the optical image for exceptional die-to-database performance. The TeraPro high productivity features of the TeraStar platform have been extended to the die-to-database mode providing the opportunity to use STARlight and die-to-database modes concurrently.

Citation Download Citation

William Waters Volk, William H. Broadbent, Hector I. Garcia, Sterling G. Watson, Phillip Lim, and Wayne E. Ruch "Multibeam high-resolution die-to-database reticle inspection", Proc. SPIE 4562, 21st Annual BACUS Symposium on Photomask Technology, (11 March 2002); https://doi.org/10.1117/12.458271

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