8 October 2001 Centering electrostatic microgripper and magazines for microassembly tasks
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Proceedings Volume 4568, Microrobotics and Microassembly III; (2001) https://doi.org/10.1117/12.444126
Event: Intelligent Systems and Advanced Manufacturing, 2001, Boston, MA, United States
Abstract
Accurate handling of microparts is one of the major tasks for an automated microproduction. The development of centering electrostatic handling devices is described. Based on a planar design common microtechnical fabrication methods were used. Therefore the gripper electrodes can easily be miniaturized and the geometric form can be adapted to the shape of the objects to be handled. The optimization of the design of the gripper was done by using the Finite Element Method. This gave the possibility to improve the centering effect and the gripping forces without increasing the operating voltage. To enable the observation of the gripped parts with a camera, a transparent substrate was used (Pyrex-wafer). This facilitates the integration of the gripper into a sensor controlled microassembly station. Futhermore first successful tests of functional models are described.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Juergen Hesselbach, Juergen Hesselbach, Stephanus Buettgenbach, Stephanus Buettgenbach, Jan Wrege, Jan Wrege, Sebastian Buetefisch, Sebastian Buetefisch, Christiane Graf, Christiane Graf, "Centering electrostatic microgripper and magazines for microassembly tasks", Proc. SPIE 4568, Microrobotics and Microassembly III, (8 October 2001); doi: 10.1117/12.444126; https://doi.org/10.1117/12.444126
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