Characterization and control of a 1-DOF monolithic piezoactuator (MPA)

Ricardo Perez; Joel Agnus; Jean-Marc Breguet; Nicolas Chaillet; Hannes Bleuler; Reymond Clavel

doi:10.1117/12.444122

8 October 2001 Characterization and control of a 1-DOF monolithic piezoactuator (MPA)

Ricardo Perez, Joel Agnus, Jean-Marc Breguet, Nicolas Chaillet, Hannes Bleuler, Reymond Clavel

Proceedings Volume 4568, Microrobotics and Microassembly III; (2001) https://doi.org/10.1117/12.444122
Event: Intelligent Systems and Advanced Manufacturing, 2001, Boston, MA, United States

Abstract

The Monolithic PiezoActuator (MPA) described in this work proposes the amplification of the piezoelectric deformation by a lever mechanism designed in a bulk piezoceramic plate. The advantages of the monolithic approach are to make the structure compact and to avoid problems of assembling reducing consequently production costs. In addition, several DOF (Degree Of Freedom) MPA can be designed with this approach. The total displacement using the MPA can reach some microns for a few millimeters size device. A numerical model has been used to simulate the static and dynamic behavior of a 1 DOF MPA. Static and dynamic measurements show a maximum displacement of around 6 mm and bandwidths as high as 5 kHz. The second part of this work is devoted to the open-loop position control of the MPA. The piezoelectric actuation is generally known to have a static behavior with a good linearity. Actually, when such an actuator is controlled by the electrical voltage, the typical hysteresis between this voltage and the corresponding deformation of the actuator can reach 20% for a soft PZT. Experimental results show an hysteresis under 10% and weak non-linearity for the MPA compared to standard piezoactuators. In order to linearize the open-loop motions, an open-loop control device which control the quantity of free electrical charges on the micro-actuator has been developed. The implementation of the control method has also given very encouraging results for MPA prototypes used in the laboratory.

Citation Download Citation

Ricardo Perez, Joel Agnus, Jean-Marc Breguet, Nicolas Chaillet, Hannes Bleuler, and Reymond Clavel "Characterization and control of a 1-DOF monolithic piezoactuator (MPA)", Proc. SPIE 4568, Microrobotics and Microassembly III, (8 October 2001); https://doi.org/10.1117/12.444122

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available