8 October 2001 Fabrication and experiment of microlegs for an insectlike microrobot
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Proceedings Volume 4568, Microrobotics and Microassembly III; (2001); doi: 10.1117/12.444123
Event: Intelligent Systems and Advanced Manufacturing, 2001, Boston, MA, United States
Abstract
This paper deals with a work in progress concerning the fabrication of an insect-like microrobot. Because of their large motions and their interesting density of energy, thermal actuation has been chosen to move this microrobot and an integrated structure has been held. Compliant thermal micro-actuators have been studied, fabricated and tested. The characterization and modeling of such kind of actuators have been done. Then, compliant microlegs for our microrobot were modelized and designed with two degrees of freedom for each leg. The design, operating cycle and process for the microfabrication of these microlegs will be given in this paper. The microlegs are constituted of two thermal bimorphs connected together with a microbeam. Several microlegs are fabricated on one silicone wafer and bonded on a printed board to allow their activation. The experimental results concerning the motions of these microlegs will be given. Based on the results of these first experiments, a second generation of microlegs were designed, fabricated and tested. Then the next step will be the microfabrication of the whole structure of the microrobot including their legs, in a monolithic way on one single silicon wafer.
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Agnes Bonvilain, Nicolas Chaillet, "Fabrication and experiment of microlegs for an insectlike microrobot", Proc. SPIE 4568, Microrobotics and Microassembly III, (8 October 2001); doi: 10.1117/12.444123; https://doi.org/10.1117/12.444123
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KEYWORDS
Silicon

Actuators

Microfabrication

Nickel

Semiconducting wafers

Electroplating

Robots

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