8 October 2001 New pneumatically actuated miniature gripper for microassembly
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Proceedings Volume 4568, Microrobotics and Microassembly III; (2001); doi: 10.1117/12.444142
Event: Intelligent Systems and Advanced Manufacturing, 2001, Boston, MA, United States
Abstract
This paper presents a micro gripper driven by a new piston type pneumatic micro actuator. The basic structure of the micro gripper and the actuator are fabricated by silicon dry etching in a single etch step. The device consists of a pyrex-silicon-pyrex sandwich structure which was mounted by anodic bonding. Alternatively a SU8 depth lithography process was used to realise the pneumatic driven micro gripper. The assembly of various micro parts including a recently presented tactile silicon 3D-micro probe is described.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sebastian Buetefisch, Stephanus Buettgenbach, "New pneumatically actuated miniature gripper for microassembly", Proc. SPIE 4568, Microrobotics and Microassembly III, (8 October 2001); doi: 10.1117/12.444142; https://doi.org/10.1117/12.444142
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KEYWORDS
Actuators

Silicon

Semiconducting wafers

Etching

Reactive ion etching

Copper

Lithography

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