Silicon three-axial tactile probe for the mechanical characterization of microgrippers

Sebastian Buetefisch; Ralph Wilke; Stephanus Buettgenbach

doi:10.1117/12.444145

8 October 2001 Silicon three-axial tactile probe for the mechanical characterization of microgrippers

Sebastian Buetefisch; Ralph Wilke; Stephanus Buettgenbach

Author Affiliations +

Proceedings Volume 4568, Microrobotics and Microassembly III; (2001) https://doi.org/10.1117/12.444145
Event: Intelligent Systems and Advanced Manufacturing, 2001, Boston, MA, United States

Abstract

A three-axial tactile micro probe for the investigation of the mechanical behavior of micro grippers and other micro assembly equipment has been developed using silicon micromachining technology. The sensor has been used to measure the restoring forces of flexural hinges in a micro gripper gear, to calibrate an integrated gripping force sensor, and to measure the generated forces of actuators used in micro grippers. The tactile micro probe is an advancement of a 3-D force sensor presented earlier.

Citation Download Citation

Sebastian Buetefisch, Sebastian Buetefisch, Ralph Wilke, Ralph Wilke, Stephanus Buettgenbach, Stephanus Buettgenbach, } "Silicon three-axial tactile probe for the mechanical characterization of microgrippers", Proc. SPIE 4568, Microrobotics and Microassembly III, (8 October 2001); doi: 10.1117/12.444145; https://doi.org/10.1117/12.444145

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years