Silicon three-axial tactile probe for the mechanical characterization of microgrippers

Sebastian Buetefisch; Ralph Wilke; Stephanus Buettgenbach

doi:10.1117/12.444145

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8 October 2001 Silicon three-axial tactile probe for the mechanical characterization of microgrippers

Sebastian Buetefisch; Ralph Wilke; Stephanus Buettgenbach

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Proceedings Volume 4568, Microrobotics and Microassembly III; (2001) https://doi.org/10.1117/12.444145
Event: Intelligent Systems and Advanced Manufacturing, 2001, Boston, MA, United States

Abstract

A three-axial tactile micro probe for the investigation of the mechanical behavior of micro grippers and other micro assembly equipment has been developed using silicon micromachining technology. The sensor has been used to measure the restoring forces of flexural hinges in a micro gripper gear, to calibrate an integrated gripping force sensor, and to measure the generated forces of actuators used in micro grippers. The tactile micro probe is an advancement of a 3-D force sensor presented earlier.

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Sebastian Buetefisch, Ralph Wilke, and Stephanus Buettgenbach "Silicon three-axial tactile probe for the mechanical characterization of microgrippers", Proc. SPIE 4568, Microrobotics and Microassembly III, (8 October 2001); https://doi.org/10.1117/12.444145

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