Theory and experiments of the one-mirror-inclined three-mirror-cavity photodetectors

Hui Huang; Yuan Zhong; Qi Wang; Yongqing Huang; Xiaomin Ren

doi:10.1117/12.444924

19 October 2001 Theory and experiments of the one-mirror-inclined three-mirror-cavity photodetectors

Hui Huang, Yuan Zhong, Qi Wang, Yongqing Huang, Xiaomin Ren

Proceedings Volume 4580, Optoelectronics, Materials, and Devices for Communications; (2001) https://doi.org/10.1117/12.444924
Event: Asia-Pacific Optical and Wireless Communications Conference and Exhibit, 2001, Beijing, China

Abstract

Research on the one-mirror-inclined three-mirror-cavity (OMITMC) photodetectors in our laboratory is reported. In the structure of the photodetectors, it is the inclined- mirror that makes the filtering cavity and the absorption cavity decoupled, thus narrow spectral response linewidth, high-speed and high quantum efficiency can be achieved simultaneously. On the basis of the theoretical analysis, we do realize the vertical taper structure, the key part in the whole integrated device, by dynamic etch mask technique. Moreover, the first integrated device of this type was fabricated. A spectral response linewidth less than 6nm and a quantum efficiency of 52.6% have been achieved experimentally.

Citation Download Citation

Hui Huang, Yuan Zhong, Qi Wang, Yongqing Huang, and Xiaomin Ren "Theory and experiments of the one-mirror-inclined three-mirror-cavity photodetectors", Proc. SPIE 4580, Optoelectronics, Materials, and Devices for Communications, (19 October 2001); https://doi.org/10.1117/12.444924

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