18 October 2001 Integrated MMI optical couplers and optical switches in silicon-on-insulator technology
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Proceedings Volume 4582, Optical Switching and Optical Interconnection; (2001) https://doi.org/10.1117/12.445077
Event: Asia-Pacific Optical and Wireless Communications Conference and Exhibit, 2001, Beijing, China
Abstract
Integrated multimode interference coupler based on silicon-on- insulator has been become a kind of more and more attractive device in optical systems. Thin cladding layers (< 1.0 micrometers ) can be used in SOI waveguide due to the large index step between Si and SiO2, making them compatible with the VLSI technology. Here we demonstrate the design and fabrication of multimode interference (MMI) optical couplers and optical switches in SOI technology.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jinzhong Yu, Jinzhong Yu, Hongzhen Wei, Hongzhen Wei, Xiaofeng Zhang, Xiaofeng Zhang, Qingfeng Yan, Qingfeng Yan, Jinsong Xia, Jinsong Xia, "Integrated MMI optical couplers and optical switches in silicon-on-insulator technology", Proc. SPIE 4582, Optical Switching and Optical Interconnection, (18 October 2001); doi: 10.1117/12.445077; https://doi.org/10.1117/12.445077
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