18 October 2001 Micromachined patch antenna and array using MEMS technology
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Proceedings Volume 4586, Wireless and Mobile Communications; (2001) https://doi.org/10.1117/12.445258
Event: Asia-Pacific Optical and Wireless Communications Conference and Exhibit, 2001, Beijing, China
Abstract
Following the development of MEMS fabrication technique, novel patch antennas are developed to become reality using surface micromachining process. In this paper, surface micromachined patch antennas are investigated and fabricated to have an excellent RF performance. The square patch antenna is designed to operate in its dominant mode with the broad radiation pattern of approximately 6.5dB in directivity. The impedance bandwidth is approximately 1.5% and the radiation efficiency is approximately 53%. The radiation patterns of micromachined patch antennas are broad in nature, when operating from 13 to 22GHz. Since the radiation efficiency and directivity (gain) of the individual element is rather weak, arrays are designed to obtain better overall the radiation efficiency and directivity.
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J.-M. Huang, J.-M. Huang, Ai Qun Liu, Ai Qun Liu, Jingbo Zhang, Jingbo Zhang, Jaeshin Ahn, Jaeshin Ahn, } "Micromachined patch antenna and array using MEMS technology", Proc. SPIE 4586, Wireless and Mobile Communications, (18 October 2001); doi: 10.1117/12.445258; https://doi.org/10.1117/12.445258
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