19 November 2001 Investigation of MoO3-WO3 thin film microstructure for gas sensing applications
Author Affiliations +
Abstract
MoO3-WO3 thin films have been fabricated via the sol-gel method. FESEM, TEM, RBS and SIMS analysis techniques have been employed to analyse the films and material properties for use as gas sensors to detect CO and NO2. FESEM shows the film made up of segregated molybdenum crystals. TEM highlights the nano-sized grains sructure and crystallinity. RBS analysis confirmed the films are stoichimetric and that the Mo component of the system decreases as the annealing temperature is increased. SIMS illustrates the interesting elemental depth profiles of the films. The films were exposed to CO and NO2. MoO3-WO3 shows better NO2 sensitivity and selectivity compared to its single metal oxide constituents.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kosmas Galatsis, Kosmas Galatsis, Muralihar K. Ghantasala, Muralihar K. Ghantasala, Yongxiang Li, Yongxiang Li, Kourosh Kalantar-Zadeh, Kourosh Kalantar-Zadeh, Adrian Trinchi, Adrian Trinchi, Wojtek Wlodarski, Wojtek Wlodarski, A. Taurino, A. Taurino, Pietro Siciliano, Pietro Siciliano, Lara Cukrov, Lara Cukrov, } "Investigation of MoO3-WO3 thin film microstructure for gas sensing applications", Proc. SPIE 4590, BioMEMS and Smart Nanostructures, (19 November 2001); doi: 10.1117/12.454610; https://doi.org/10.1117/12.454610
PROCEEDINGS
8 PAGES


SHARE
RELATED CONTENT

Ti Mo and Mo W mixed oxides for gas sensing...
Proceedings of SPIE (November 12 2002)
Chemical gas sensors on silicon
Proceedings of SPIE (September 14 1995)
Characterization Of Isolated Silicon Epitaxy Material
Proceedings of SPIE (August 15 1988)

Back to Top