21 November 2001 Design and test of a low-drift low-noise large-range micro-accelerometer
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Abstract
As the working range goes up, micro-accelerometer confronts big challenges at sensitivity and time stability. In this paper, the scheme of design and test of a large operating range accelerometer with low drift and low noise is presented. The focus is on the structure design, process consideration and interface circuit optimization. Computer simulations of sensor structure and servo system are also introduced. The accelerometer is produced and tested. Gravity field and centrifugal measurement shows that its sensing range reaches 60g, and the full-scale nonlinearity is less than 1x10-4. The noise level is monitored to be less than 3mg/(rootHz. As the time stability is concerned, it takes a few seconds to give out a stable output, the drift less than 0.01g, and the long-term drift is as low as 3mg.
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Wei Su, Wei Su, Mei Li, Mei Li, Xiao-ping He, Xiao-ping He, } "Design and test of a low-drift low-noise large-range micro-accelerometer", Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); doi: 10.1117/12.449158; https://doi.org/10.1117/12.449158
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