Translator Disclaimer
Paper
21 November 2001 Mass sensitivity of layered shear-horizontal surface acoustic wave devices for sensing applications
Author Affiliations +
Abstract
Layered Surface Acoustic Wave (SAW) devices that allow the propagation of Love mode acoustic waves will be studied in this paper. In these devices, the substrate allows the propagation of Surface Skimming Bulks Waves (SSBWs). By depositing layers, that the speed of Shear Horizontal (SH) acoustic wave propagation is less than that of the substrate, the propagation mode transforms to Love mode. Love mode devices which will be studied in this paper, have SiO2 and ZnO acoustic guiding layers. As Love mode of propagation has no movement of particles component normal to the active sensor surface, they can be employed for the sensing applications in the liquid media.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kourosh Kalantar-Zadeh, Adrian Trinchi, Wojtek Wlodarski, Anthony Holland, and Kosmas Galatsis "Mass sensitivity of layered shear-horizontal surface acoustic wave devices for sensing applications", Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); https://doi.org/10.1117/12.449140
PROCEEDINGS
12 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT


Back to Top