21 November 2001 Modeling MEMS manufacturability in virtual prototyping CAD tool
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The MEMS Virtual Prototyping project aims at building a simulation environment that aids in the design of MicroElectroMechanical devices (MEMS). It embodies Computer-Aided Design (CAD) tools for modeling and simulating the functioning of MEMS in virtual reality and to provide visualizations of their performance as multi-parameter functions as virtual reality visualizations and as plots, both based on analytical calculations. The introduction of CAD packages was a critical step in the widespread development of VLSI devices. Despite the demand, there is a noticeable lack of CAD tools to aid in the development of MEMS devices. The purpose of the project presented in this paper is to overcome the weaknesses of the few MEMS-CAD tools that are available. This project analyzes the fundamental steps towards (a) determining critical parameters for typical classes of MEMS (sensors and actuators) (b) identifying visualizations that are meaningful in the MEMS design process, and (c) a novel graphic user-interface architecture to facilitate task switching in CAD-tools, and reducing screen clutter. This paper also describes the Manufacturing module, it explains Visual Design Optimization and provides an application example.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Renate Sitte, Renate Sitte, } "Modeling MEMS manufacturability in virtual prototyping CAD tool", Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); doi: 10.1117/12.449141; https://doi.org/10.1117/12.449141

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