21 November 2001 Nanoelectronic and nanomechanical systems
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Abstract
Nanomechanical systems, integrated with nanoelectronic transducers and sensors, are in an early stage of development. Research is focused on the development of radiofrequency mechanical resonators, sensitive electrometers and magnetometers, and potentially quantum-limited energy and motion sensors. This paper will review the current state of our efforts in this area, and will describe research in which the integration of mechanics and electronics will potentially allow the demonstration of macroscopic quantum effects in mechanical systems. We are particularly interested in observing and measuring quantum-limited systems, whose behavior is strongly affected by the measurement system; such systems may provide further insight into the quantum measurement process.
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J. S. Aldridge, J. S. Aldridge, Andrew N. Cleland, Andrew N. Cleland, R. Knobel, R. Knobel, D. R. Schmidt, D. R. Schmidt, C. S. Yung, C. S. Yung, } "Nanoelectronic and nanomechanical systems", Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); doi: 10.1117/12.449143; https://doi.org/10.1117/12.449143
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