As MEMS devices are finding more application areas and new devices are developed, the designs of MEMS are becoming more complex. Without computer aid, designers have to rely on experiment and it becomes time consuming. There are a few commercial MEMS design tools are available currently, however these design tools have their limitations. This paper presents the work towards a user friendly MEMS Virtual Reality MEMS CAD tools that models, simulates, and provides the behavior characteristics and virtual reality visualization of MEMS devices. In this part of the project - the sensor component, we analyze the requirements for modeling MEMS sensors by investigating several types of MEMS, their operating characteristics and their corresponding design parameters. An application example serves to illustrate the analysis and applicability of the models in the sensors component, and to investigate its interaction with other components such as user interface, VR animation, and manufacturing module.