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21 November 2001 Thin film characterization using terahertz differential time-domain spectroscopy and double modulation
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Abstract
Characterizing the optical and dielectric properties of thin films in the GHz to THz range is critical for the development of new technologies in integrated circuitry, photonics systems and micro-opto-electro-mechanical systems (MOEMS). Terahertz differential time-domain spectroscopy (DTDS) is a new technique that uses pulsed terahertz (THz) radiation to detect phase changes of less than 0.6 femtoseconds (fs) and absorption changes corresponding to several molecular monolayers. This paper shows how DTDS can be combined with double modulation in the pump-probe system to improve sensitivity by an order of magnitude. The technique is experimentally verified using 1 μm thick samples of silicon dioxide on silicon.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Samuel P. Mickan, Kwang-Su Lee, Toh-Ming Lu, Edward Barnat, Jesper Munch, Derek Abbott, and Xi-Cheng Zhang "Thin film characterization using terahertz differential time-domain spectroscopy and double modulation", Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); https://doi.org/10.1117/12.449149
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