21 November 2001 Virtual reality modeling aid in MEMS design
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Abstract
The pleasing and intuitive visualization images of Micro-Electro-Mechanical Systems (MEMS) assist microtechnology researchers and designers extract significant features and results quickly and easily. The detailed visualization through different points of view may reduce a MEMS design trial and error phase for system elements dimension and placement. The work presented in this paper is part of a research project for developing MEMS Virtual Reality prototyping software. The objective of the project is to build a simulation environment that aids in the MEMS design. Scientific visualization design tools make it easier for MEMS designers to view their results functioning in 3D Virtual Reality on a computer screen before shaping a physical prototype. This paper discusses the issues that are relevant in the development of producing the MEMS VR images and their animations. The images for applying visualization and Virtual Reality to demonstrate a sensor and an actuator are shown.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhaoyi Li, Renate Sitte, "Virtual reality modeling aid in MEMS design", Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); doi: 10.1117/12.449145; https://doi.org/10.1117/12.449145
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