21 November 2001 1D and 2D scanning mirrors using thermal buckle-beam actuation
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Abstract
Micromirrors with linear deflection behaviors have been found useful for systems requiring 1D and 2D optical scanning patterns and are solutions for low-cost vector or video raster image generators. The advantages of thermal buckle-beam and bimorph actuators are high resulting force, low MEMS area and low voltage requirements. The devices presented in this paper can achieve modest deflection angles at relatively high frequencies. The mirror actuators consists of a doubly clamped array of polysilicon beams that are Joule heated and allowed to buckle out-of-plane. Instead of utilizing the usual linear displacement, a torque is derived from a coupling beam attached across the buckling beams at the point of the maximum derivative of buckle. As the beams buckle, the torque causes the mirror to be rotated away from the substrate. Non-resonant, near-linear mirror deflection response has been achieved with a maximum deflection of six mechanical degrees at a frequency of a few KHz. Employing a high Q resonant structure, a frequency of 16 KHz has been attained with a 1D mirror scanner at a maximum mechanical deflection of around 20 degrees. 1D and 2D scanning mirror devices have been built and will be reviewed in this paper.
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Michael Sinclair, Michael Sinclair, } "1D and 2D scanning mirrors using thermal buckle-beam actuation", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); doi: 10.1117/12.448982; https://doi.org/10.1117/12.448982
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