21 November 2001 Copper microcoil arrays for the actuation of optical matrix microswitches
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Abstract
Copper micro-coil arrays have been designed and realized by electroplating for the actuation of arrays of optical matrix micro-switches. The good operation of the micro-switches needs large force that is well fulfilled by the electromagnetic actuation of copper micro-coils. The electromagnetic behavior of the actuator has been examined using the simulator FLUX2DTM and an optimized configuration of ferromagnetic materials was determined. Arrays of micro-coils with high aspect ratio have been achieved with the use of SU8 resin mould. The diameters of micro-coils range from 0.5 millimeters to 4 millimeters with thickness of about 30 micrometers and few tens of turns. Electric measurements have been done in order to characterize the micro-coils.
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Lionel Houlet, Lionel Houlet, Gilbert Reyne, Gilbert Reyne, Tetsuhiko Iizuka, Tetsuhiko Iizuka, Tarik Bourouina, Tarik Bourouina, Elizabeth-Dufour Gergam, Elizabeth-Dufour Gergam, Hiroyuki Fujita, Hiroyuki Fujita, } "Copper microcoil arrays for the actuation of optical matrix microswitches", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); doi: 10.1117/12.448997; https://doi.org/10.1117/12.448997
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