21 November 2001 Enabling MEMS technologies for communications systems
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Abstract
Modern communications demands have been steadily growing not only in size, but sophistication. Phone calls over copper wires have evolved into high definition video conferencing over optical fibers, and wireless internet browsing. The technology used to meet these demands is under constant pressure to provide increased capacity, speed, and efficiency, all with reduced size and cost. Various MEMS technologies have shown great promise for meeting these challenges by extending the performance of conventional circuitry and introducing radical new systems approaches. A variety of strategic MEMS structures including various cost-effective free-space optics and high-Q RF components are described, along with related practical implementation issues. These components are rapidly becoming essential for enabling the development of progressive new communications systems technologies including all-optical networks, and low cost multi-system wireless terminals and basestations.
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Victor M. Lubecke, Bradley P. Barber, Susanne Arney, "Enabling MEMS technologies for communications systems", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); doi: 10.1117/12.448975; https://doi.org/10.1117/12.448975
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KEYWORDS
Microelectromechanical systems

Resonators

Mars

Acoustics

Inductance

Telecommunications

Modulators

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