Fabrication of refractive and diffractive plastic micro-optical components using microcompression molding

Su-dong Moon; Suho Ahn; Shinill Kang; Doo-Sun Choi; Tae-Jin Je

doi:10.1117/12.448959

21 November 2001 Fabrication of refractive and diffractive plastic micro-optical components using microcompression molding

Su-dong Moon, Suho Ahn, Shinill Kang, Doo-Sun Choi, Tae-Jin Je

Author Affiliations +

Proceedings Volume 4592, Device and Process Technologies for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448959
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

As the demand of the micro-optics in the field of optical data storage, optical communication, and digital display has been increased, it has become important to establish fabrication technology for plastic micro-optics, which have advantage mainly in manufacturing cost. Micromolding methods such as micro-injection molding and micro- compression molding are most suitable for mass production of plastic micro-optics with low cost. In the present study, plastic micro-optical components, such as refractive microlenses and diffractive optical elements (DOEs) with various grating patterns, were fabricated using micro- compression molding process. The mold inserts were made by ultra precision mechanical machining, and silicon etching. A micro compression molding system was designed and developed. Polymer films and powders were used as molded materials. Various defects found during molding were analyzed, and the process was optimized experimentally by controlling the governing process parameters such as histories of mold temperature and compression pressure. Micro lenses of hemispherical shape with 153micrometers radius of curvature were fabricated. The blazed and 4 stepped diffractive optical elements with 24micrometers pitch and 5micrometers depth were also fabricated. Optical and geometrical properties of plastic molded parts were measured by interferometric technique.

Citation Download Citation

Su-dong Moon, Suho Ahn, Shinill Kang, Doo-Sun Choi, and Tae-Jin Je "Fabrication of refractive and diffractive plastic micro-optical components using microcompression molding", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); https://doi.org/10.1117/12.448959

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