21 November 2001 Materials and reliability issues in MEMS and microsystems
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Abstract
MEMs are basically sensors and actuators in a harsh environment or strains exceeding 102 and strain rates approaching shock deformation conditions. The reliability concerns are electronic, optical and micro-mechanical. Surface morphology of sensors and actuators becomes critical and the investigation presents results on diamond like films developed for resolving tribology related problems in MEMs rotating surfaces. Other MEMs results on surface passivation are reviewed.
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Aristos Christou, Aristos Christou, } "Materials and reliability issues in MEMS and microsystems", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); doi: 10.1117/12.448984; https://doi.org/10.1117/12.448984
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