Micro displacement sensing system and its application to micro magnetic bearings

LiJiang Qin; Ronald B. Zmood; Paul E. Jones; Dinesh K. Sood

doi:10.1117/12.448969

21 November 2001 Micro displacement sensing system and its application to micro magnetic bearings

LiJiang Qin, Ronald B. Zmood, Paul E. Jones, Dinesh K. Sood

Proceedings Volume 4592, Device and Process Technologies for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448969
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

In this paper we present a novel displacement sensing system where the sensing direction is in the plane of the planar sensor coils. Particular emphasis in this work is given to the design and micro fabrication of the sensor coils. It has been found that the position of the sensor coils is extremely important as the location of the sensor coils relative to the target significantly affects the sensitivity of the resultant sensing system. Extensive experiments have been carried out and show that best sensitivity is achieved when the sensor coil is located so that the overlap area between the rotor and the sensor coil turns changes most rapidly with the rotor displacement. Following the preliminary analysis and experiments, new optimized sensor coils have been designed and micro fabricated using UV lithography and electroplating, as detailed in the paper. Performance testing of the resultant sensing system has been carried out and is reported in the paper.

Citation Download Citation

LiJiang Qin, Ronald B. Zmood, Paul E. Jones, and Dinesh K. Sood "Micro displacement sensing system and its application to micro magnetic bearings", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); https://doi.org/10.1117/12.448969

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Sensors

Sensing systems

Magnetism

Photomasks

Semiconducting wafers

Computer aided design

Magnetic sensors

Show All Keywords

Keywords/Phrases

Search In:

Publication Years