Si micromachining for optics: optical components and sensors

Kazuhiro Hane; Minoru Sasaki; Jong Hyeong Song

doi:10.1117/12.448978

21 November 2001 Si micromachining for optics: optical components and sensors

Kazuhiro Hane, Minoru Sasaki, Jong Hyeong Song

Proceedings Volume 4592, Device and Process Technologies for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448978
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

Si micromachining is a promising technique for fabricating several optical components. It is also indispensable for the low-cost assembly. We studied the Si micromachining for fabricating optical sensors and components. The Si crystalline etching was studied for generating the mirror surface smooth enough to be used in micro-laser-cavity. The etched Si mirror surface was transferred to the polymer replica by molding. Laser oscillation was demonstrated with the replicated solid-dye-micro-laser. The optical transmission structures were also fabricated by etching through Si wafer with the deep RIE, and used for new optical components. The integrated pinhole filter, position sensor and optical encoder were proposed. Integration of optical components with micro-actuator makes the optical system variable. The three-dimensional structures with actuators were fabricated by the new lithographic technique using spray resist coater. A tunable filter for telecommunication and a laser beam scanner with micro-mirror were fabricated.

Citation Download Citation

Kazuhiro Hane, Minoru Sasaki, and Jong Hyeong Song "Si micromachining for optics: optical components and sensors", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); https://doi.org/10.1117/12.448978

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