19 November 2001 Electrostatic interactions in micro-electro-mechanical resonant oscillators
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Abstract
Resonant mode operation is common in many MicroElectroMechanical (MEM) applications including accelerometers, gyroscopes and filters [Kovacs (1998), Nguyen (1999)]. When electrostatic transduction is used in these applications, concerns about cross talk and fringing field effects due to geometry are major issues. In this paper, an electrostatically coupled system is briefly introduced, modeled and the dynamic response due to small parametric (displacement dependant) electrostatic force is analyzed using perturbation methods. The presence of coupled parametric resonance has a very significant effect on the dynamic response. Experimental verification of the occurrence of this phenomenon is also presented here. The coupled oscillator system can also be used as an in situ test device to understand the electrostatic parameters in a system. The method of modeling and analysis presented here is simple, yet captures the dynamic behavior of a system due to a small force. This method can be generalized and will be a useful tool in any resonant MEM system design.
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Rajashree Baskaran, Rajashree Baskaran, Kimberly L. Turner, Kimberly L. Turner, } "Electrostatic interactions in micro-electro-mechanical resonant oscillators", Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); doi: 10.1117/12.448835; https://doi.org/10.1117/12.448835
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