MOEM-based optical switch collimating lens

Mark Roderick Mackenzie; Chee Yee Kwok

doi:10.1117/12.448848

19 November 2001 MOEM-based optical switch collimating lens

Proceedings Volume 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448848
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

This paper describes the results of simulation studies for the design of an integrated collimating waveguide lens pair. The lens pair has application in MOEM based optical switches which rely on the free space propagation of an optical beam over a matrix of micro-mirrors. Consideration is given to the simulated tolerance to various misalignment and processing errors.

Citation Download Citation

Mark Roderick Mackenzie and Chee Yee Kwok "MOEM-based optical switch collimating lens", Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); https://doi.org/10.1117/12.448848

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