19 November 2001 Shape analysis of cylindrical micromirrors for angular focusing
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Abstract
In this paper, we analyze the shape of the cylindrical micromirror, which directly defines the profile of the reflecting surface, and is very important for the function on focusing. A cylindrical micromirror can converge incident rays to a real focal line after reflection, namely angular focusing. Therefore, under specific design two cylindrical micromirrors, the primary and secondary, can converge incident rays into a real focal point after twice reflection. The curved shape of micromirror, formed due to the stress-induced bending of the bilayer microstructure upon release, has been theoretically analyzed and numerically simulated. The results show that the reflecting surface, especially at boundaries, is not perfectly cylindrical, while adding longitudinal frames can make some improvement.
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Max Ti-Kuang Hou, Pei-Yuan Hong, Rongshun Chen, "Shape analysis of cylindrical micromirrors for angular focusing", Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); doi: 10.1117/12.448843; https://doi.org/10.1117/12.448843
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KEYWORDS
Micromirrors

Finite element methods

Shape analysis

Mirrors

Reflection

Solids

3D modeling

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