Thermal modeling of a MEMS for determination of fluid and flow characteristics

Nicolae Damean; Paul P. L. Regtien

doi:10.1117/12.448847

19 November 2001 Thermal modeling of a MEMS for determination of fluid and flow characteristics

Nicolae Damean, Paul P. L. Regtien

Proceedings Volume 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448847
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

The paper presents an one-dimensional model for the heat transfer in a limited but significant region of an actuator-sensor structure for the determination of fluid and flow characteristics. As an essential step for the designing process of this structure, the usefulness of the model in the framework of the structure's functionality is underlined. In the first part of the work, the main heat transfer mechanisms are detailed by qualitative and quantitative evaluations. The one-dimensional model is derived from the heat balance of the region we are interested in. In the second part of the work, we compare the data obtained by simulating this model with the experimental data we have. Also, some full three-dimensional simulations of the fluid flow and heat transfer we made using a commercial software package. Part of these numerical results are compared with the corresponding experimental data. The modeling errors are discussed for the both sets of comparisons. Finally, we comment the merits of the one-dimensional model versus the three-dimensional approach. The achieved results obtained herein might be directly used for various thermal based actuators and sensors for flow control and measurement both in micro and macro world.

Citation Download Citation

Nicolae Damean and Paul P. L. Regtien "Thermal modeling of a MEMS for determination of fluid and flow characteristics", Proc. SPIE 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II, (19 November 2001); https://doi.org/10.1117/12.448847

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