29 October 2001 Thermal effect study in excimer laser ablation of polyimide
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Proceedings Volume 4595, Photonic Systems and Applications; (2001) https://doi.org/10.1117/12.446602
Event: International Symposium on Photonics and Applications, 2001, Singapore, Singapore
Abstract
In this paper we reported the results of investigation on surface deformation caused by thermal effect during excimer laser ablation of polyimide. Obvious surface deformation around the hole entrance was observed during the experiment. The surface topology and cross-section of the ablated holes were analyzed using Zygo and SEM. It was shown that ring feature of 17 to 150 nm in height and 1 to 3 micrometers in width was formed above the level of the unablated surface. The deformed surface showed rough and color-changed characteristics. An optical diffraction model was employed to explain the causing of this kind of deformation. It was found that the ablating and heating by near- and under-threshold laser beam became thermal effect to polyimide material ablation, which was contributed by diffraction effect of optical projection system.
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Jianhui Gu, Jianhui Gu, Eugene Tay, Eugene Tay, Puay Khim Lim, Puay Khim Lim, Pean Lim, Pean Lim, } "Thermal effect study in excimer laser ablation of polyimide", Proc. SPIE 4595, Photonic Systems and Applications, (29 October 2001); doi: 10.1117/12.446602; https://doi.org/10.1117/12.446602
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