Surface profile measurement using a CD optical pickup head

Zhaowei Zhong; W. W. Tham

doi:10.1117/12.447370

30 October 2001 Surface profile measurement using a CD optical pickup head

Zhaowei Zhong, W. W. Tham

Proceedings Volume 4596, Advanced Photonic Sensors and Applications II; (2001) https://doi.org/10.1117/12.447370
Event: International Symposium on Photonics and Applications, 2001, Singapore, Singapore

Abstract

Surface profile measurement using a CD optical pickup head was studied. A simple controller capable of driving the laser diode in the optical pickup head with a power control feature was developed. A simple setup with the optical probe was used for experiments of surface profile measurement. The relationship between the height change and the light intensity received by the photo detector was studied. Hill-shape-like curves were obtained and the relationship was verified experimentally.

Citation Download Citation

Zhaowei Zhong and W. W. Tham "Surface profile measurement using a CD optical pickup head", Proc. SPIE 4596, Advanced Photonic Sensors and Applications II, (30 October 2001); https://doi.org/10.1117/12.447370

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