30 October 2001 Wavefront sensing of a rear-surface reflection through a transparent media suppressing multiple-beam interference effect
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Proceedings Volume 4596, Advanced Photonic Sensors and Applications II; (2001) https://doi.org/10.1117/12.447367
Event: International Symposium on Photonics and Applications, 2001, Singapore, Singapore
Abstract
Non-destructive profiling of the front and rear surfaces of a transparent media by optical interferometry is described. Interferometric measurement of a transparent parallel media leads to problems of multiple-beam interference noise between the two surfaces. A wavelength scanning interferometer with new sampling functions can determine both surface shapes simultaneously suppressing internal reflection noises less than order of R2(lambda) where R is the reflection index of the media and (lambda) is the source wavelength.
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Kenichi Hibino, Kenichi Hibino, Toshiyuki Takatsuji, Toshiyuki Takatsuji, Sonko Osawa, Sonko Osawa, Tomizo Kurosawa, Tomizo Kurosawa, "Wavefront sensing of a rear-surface reflection through a transparent media suppressing multiple-beam interference effect", Proc. SPIE 4596, Advanced Photonic Sensors and Applications II, (30 October 2001); doi: 10.1117/12.447367; https://doi.org/10.1117/12.447367
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